Fabrication of porous metal nanoparticles and microbumps by means of nanosecond laser pulses focused through the fiber microaxicon.

We present a novel optical element - fiber microaxicon (FMA) for laser radiation focusing into a diffraction-limited spot with Bessel-like profile as well as for precision laser nanostructuring of metal film surfaces. Using the developed FMA for single-pulse irradiation of Au/Pd metal films on quartz substrate we have demonstrated the formation of submicron hollow microbumps with a small spike atop as well as hollow spherical nanoparticles. Experimental conditions for controllable and reproducible formation of ordered arrays of such microstructures were defined. The internal structure of the fabricated nanoparticles and nanobumps was experimentally studied using both argon ions polishing and scanning electron microscopy. These methods reveal a porous inner structure of laser-induced nanoparticles and nanobumps, which presumably indicates that a subsurface boiling of the molten metal film is a key mechanism determining the formation process of such structures.